Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
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| Hoofdauteurs: | , , |
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| Formaat: | Boek |
| Taal: | English |
| Gepubliceerd in: |
Noyes Publications
2011
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| Onderwerpen: | |
| Online toegang: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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| Samenvatting: | This book provides a perspective look at a range of thin film plasma processing technologies. |
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