Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
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Noyes Publications
2011
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| On-line přístup: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
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oai:scholar.dlu.edu.vn:DLU123456789-251722011-08-31T03:11:59Z Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions Rossnagel, Stephen M. Cuomo, Jenome J. Westwood, William D. Hóa học This book provides a perspective look at a range of thin film plasma processing technologies. 2011-08-31T03:11:59Z 2011-08-31T03:11:59Z 1990 Book 0-8 155-1 220-1 https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 en application/rar Noyes Publications |
| institution |
Thư viện Trường Đại học Đà Lạt |
| collection |
Thư viện số |
| language |
English |
| topic |
Hóa học |
| spellingShingle |
Hóa học Rossnagel, Stephen M. Cuomo, Jenome J. Westwood, William D. Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions |
| description |
This book provides a perspective look at a range of thin film plasma processing technologies. |
| format |
Book |
| author |
Rossnagel, Stephen M. Cuomo, Jenome J. Westwood, William D. |
| author_facet |
Rossnagel, Stephen M. Cuomo, Jenome J. Westwood, William D. |
| author_sort |
Rossnagel, Stephen M. |
| title |
Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions |
| title_short |
Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions |
| title_full |
Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions |
| title_fullStr |
Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions |
| title_full_unstemmed |
Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions |
| title_sort |
handbook of plasma processing technology - fundamentals, etching, deposition, and surface interactions |
| publisher |
Noyes Publications |
| publishDate |
2011 |
| url |
https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
| _version_ |
1819771899496890368 |