Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
Wedi'i Gadw mewn:
Prif Awduron: | Rossnagel, Stephen M., Cuomo, Jenome J., Westwood, William D. |
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Fformat: | Llyfr |
Iaith: | English |
Cyhoeddwyd: |
Noyes Publications
2011
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Pynciau: | |
Mynediad Ar-lein: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
Tagiau: |
Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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