Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
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| Main Authors: | , , |
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| Format: | Book |
| Language: | English |
| Published: |
Noyes Publications
2011
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| Subjects: | |
| Online Access: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
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| Institutions: | Thư viện Trường Đại học Đà Lạt |
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