Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions

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Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions

This book provides a perspective look at a range of thin film plasma processing technologies.

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Bibliografiset tiedot
Päätekijät:	Rossnagel, Stephen M., Cuomo, Jenome J., Westwood, William D.
Aineistotyyppi:	Kirja
Kieli:	English
Julkaistu:	Noyes Publications 2011
Aiheet:	Hóa học
Linkit:	https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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