Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
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Autori principali: | Rossnagel, Stephen M., Cuomo, Jenome J., Westwood, William D. |
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Natura: | Libro |
Lingua: | English |
Pubblicazione: |
Noyes Publications
2011
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Soggetti: | |
Accesso online: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
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Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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