Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions

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Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions

This book provides a perspective look at a range of thin film plasma processing technologies.

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Библиографические подробности
Главные авторы:	Rossnagel, Stephen M., Cuomo, Jenome J., Westwood, William D.
Формат:	‌
Язык:	English
Опубликовано:	Noyes Publications 2011
Предметы:	Hóa học
Online-ссылка:	https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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