Handbook of Plasma Processing Technology - Fundamentals, Etching, Deposition, and Surface Interactions
This book provides a perspective look at a range of thin film plasma processing technologies.
Đã lưu trong:
Những tác giả chính: | Rossnagel, Stephen M., Cuomo, Jenome J., Westwood, William D. |
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格式: | 圖書 |
語言: | English |
出版: |
Noyes Publications
2011
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主題: | |
在線閱讀: | https://scholar.dlu.edu.vn/thuvienso/handle/DLU123456789/25172 |
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Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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