Fundamentals of semiconductor manufacturing and process control

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to bo...

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שמור ב:
מידע ביבליוגרפי
מחבר ראשי: May, Gary S.
פורמט: ספר
שפה:Undetermined
יצא לאור: Hoboken, N.J. Wiley-Interscience 2006
נושאים:
תגים: הוספת תג
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ
תיאור
סיכום:Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.