Fundamentals of semiconductor manufacturing and process control

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to bo...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Prif Awdur: May, Gary S.
Fformat: Llyfr
Iaith:Undetermined
Cyhoeddwyd: Hoboken, N.J. Wiley-Interscience 2006
Pynciau:
Tagiau: Ychwanegu Tag
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ
LEADER 01049nam a2200217Ia 4500
001 CTU_124115
008 210402s9999 xx 000 0 und d
020 |c 1279000 
082 |a 621.38152 
082 |b M466 
100 |a May, Gary S. 
245 0 |a Fundamentals of semiconductor manufacturing and process control 
245 0 |c Gary S. May, Costas J. Spanos 
260 |a Hoboken, N.J. 
260 |b Wiley-Interscience 
260 |c 2006 
520 |a Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. 
650 |a Semiconductors,Process control,Integrated circuits 
650 |x Design and construction,Statistical methods,Design and construction 
904 |i Minh 
980 |a Trung tâm Học liệu Trường Đại học Cần Thơ