Fundamentals of semiconductor manufacturing and process control
Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to bo...
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| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Hoboken, N.J.
Wiley-Interscience
2006
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
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| LEADER | 01049nam a2200217Ia 4500 | ||
|---|---|---|---|
| 001 | CTU_124115 | ||
| 008 | 210402s9999 xx 000 0 und d | ||
| 020 | |c 1279000 | ||
| 082 | |a 621.38152 | ||
| 082 | |b M466 | ||
| 100 | |a May, Gary S. | ||
| 245 | 0 | |a Fundamentals of semiconductor manufacturing and process control | |
| 245 | 0 | |c Gary S. May, Costas J. Spanos | |
| 260 | |a Hoboken, N.J. | ||
| 260 | |b Wiley-Interscience | ||
| 260 | |c 2006 | ||
| 520 | |a Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts. | ||
| 650 | |a Semiconductors,Process control,Integrated circuits | ||
| 650 | |x Design and construction,Statistical methods,Design and construction | ||
| 904 | |i Minh | ||
| 980 | |a Trung tâm Học liệu Trường Đại học Cần Thơ | ||