Fundamentals of semiconductor manufacturing and process control

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to bo...

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Hlavní autor: May, Gary S.
Médium: Kniha
Jazyk:Undetermined
Vydáno: Hoboken, N.J. Wiley-Interscience 2006
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ