ULSI semiconductor technology atlas

Ultra Large Scale Integration (ULSI)_refers to chips with_more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process tech...

Täydet tiedot

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Bibliografiset tiedot
Päätekijä: Tung, Chih-Hang
Aineistotyyppi: Kirja
Kieli:Undetermined
Julkaistu: Hoboken, N.J. John Wiley & Sons 2003
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