ULSI semiconductor technology atlas

Ultra Large Scale Integration (ULSI)_refers to chips with_more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process tech...

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Autor principal: Tung, Chih-Hang
Format: Llibre
Idioma:Undetermined
Publicat: Hoboken, N.J. John Wiley & Sons 2003
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