Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: Liang, Hong
التنسيق: كتاب
اللغة:Undetermined
منشور في: London Taylor and Francis 2004
الموضوعات:
الوسوم: إضافة وسم
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ

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