Tribology in chemical mechanical planarization

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Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

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书目详细资料
主要作者:	Liang, Hong
格式:	图书
语言:	Undetermined
出版:	London Taylor and Francis 2004
主题:	Tribology,Grinding and polishing
标签:	添加标签没有标签, 成为第一个标记此记录!

Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Cần Thơ

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