Tribology in chemical mechanical planarization

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Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

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Bibliografski detalji
Glavni autor:	Liang, Hong
Format:	Knjiga
Jezik:	Undetermined
Izdano:	London Taylor and Francis 2004
Teme:	Tribology,Grinding and polishing
Oznake:	Dodaj oznaku Bez oznaka, Budi prvi tko označuje ovaj zapis!

Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Cần Thơ

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