Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Päätekijä: Liang, Hong
Aineistotyyppi: Kirja
Kieli:Undetermined
Julkaistu: London Taylor and Francis 2004
Aiheet:
Tagit: Lisää tagi
Ei tageja, Lisää ensimmäinen tagi!
Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ

Samankaltaisia teoksia