Tribology in chemical mechanical planarization

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Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

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Dades bibliogràfiques
Autor principal:	Liang, Hong
Format:	Llibre
Idioma:	Undetermined
Publicat:	London Taylor and Francis 2004
Matèries:	Tribology,Grinding and polishing
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Cần Thơ

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