Tribology in chemical mechanical planarization

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and...

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Detalles Bibliográficos
Autor Principal: Liang, Hong
Formato: Libro
Idioma:Undetermined
Publicado: London Taylor and Francis 2004
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