Fringing field and short channel effects in thin-body SOI MOSFETs with shallow source/drain

This work explores numerically the short-channel effects in thin-body SOI MOSFETs with shallow source/drain architecture, where the junction depths are less than the associated silicon body thicknesses. Unique fringing field and short-channel behavior are observed in the unconventional SOI devices....

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Những tác giả chính: Jui-Kai Hsia, Chun-Hsing Shih, Ting-Shiuan Kang, Nguyễn, Đăng Chiến, Nguyen Van Kien
Formáid: Conference paper
Teanga:English
Foilsithe: IEEE Publishing 2024
Ábhair:
Rochtain Ar Líne:https://scholar.dlu.edu.vn/handle/123456789/3307
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Achoimre:This work explores numerically the short-channel effects in thin-body SOI MOSFETs with shallow source/drain architecture, where the junction depths are less than the associated silicon body thicknesses. Unique fringing field and short-channel behavior are observed in the unconventional SOI devices. Numerical results of the short-channel effects are compared with those in the conventional SOI MOSFETs. For given silicon body thicknesses, the shallow junction SOI devices exhibit the superior short-channel immunity over the conventional counterparts.