Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...

पूर्ण विवरण

में बचाया:
ग्रंथसूची विवरण
मुख्य लेखक: Mattox, D. M.
स्वरूप: पुस्तक
भाषा:Undetermined
प्रकाशित: Westwood, N.J. Noyes Publications 1998
विषय:
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