Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...

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التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Mattox, D. M.
التنسيق:	كتاب
اللغة:	Undetermined
منشور في:	Westwood, N.J. Noyes Publications 1998
الموضوعات:	Công nghệ mạ chân không,Physical vapor deposition Handbooks, manuals, etc.
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Cần Thơ


LEADER	01169nam a2200241Ia 4500
001	CTU_237205
008	210402s9999 xx 000 0 und d
082			\|a 671.7
082			\|b M444
100			\|a Mattox, D. M.
245		0	\|a Handbook of physical vapor deposition (PVD) processing :
245		0	\|b Film formation, adhesion, surface preparation and contamination control
245		0	\|c Donald M. Mattox.
260			\|a Westwood, N.J.
260			\|b Noyes Publications
260			\|c 1998
520			\|a This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications.
526			\|a Vật lý màng mỏng
526			\|b TN399
650			\|a Công nghệ mạ chân không,Physical vapor deposition
650			\|x Handbooks, manuals, etc.
910			\|a Tuyến
980			\|a Trung tâm Học liệu Trường Đại học Cần Thơ

Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

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