Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...
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| 主要作者: | |
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| 格式: | 圖書 |
| 語言: | Undetermined |
| 出版: |
Westwood, N.J.
Noyes Publications
1998
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Cần Thơ |
|---|
| LEADER | 01169nam a2200241Ia 4500 | ||
|---|---|---|---|
| 001 | CTU_237205 | ||
| 008 | 210402s9999 xx 000 0 und d | ||
| 082 | |a 671.7 | ||
| 082 | |b M444 | ||
| 100 | |a Mattox, D. M. | ||
| 245 | 0 | |a Handbook of physical vapor deposition (PVD) processing : | |
| 245 | 0 | |b Film formation, adhesion, surface preparation and contamination control | |
| 245 | 0 | |c Donald M. Mattox. | |
| 260 | |a Westwood, N.J. | ||
| 260 | |b Noyes Publications | ||
| 260 | |c 1998 | ||
| 520 | |a This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. | ||
| 526 | |a Vật lý màng mỏng | ||
| 526 | |b TN399 | ||
| 650 | |a Công nghệ mạ chân không,Physical vapor deposition | ||
| 650 | |x Handbooks, manuals, etc. | ||
| 910 | |a Tuyến | ||
| 980 | |a Trung tâm Học liệu Trường Đại học Cần Thơ | ||