Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...

Szczegółowa specyfikacja

Zapisane w:
Opis bibliograficzny
1. autor: Mattox, D. M.
Format: Książka
Język:Undetermined
Wydane: Westwood, N.J. Noyes Publications 1998
Hasła przedmiotowe:
Etykiety: Dodaj etykietę
Nie ma etykietki, Dołącz pierwszą etykiete!
Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ
Opis
Streszczenie:This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications.