Handbook of physical vapor deposition (PVD) processing : Film formation, adhesion, surface preparation and contamination control

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that...

Täydet tiedot

Tallennettuna:
Bibliografiset tiedot
Päätekijä: Mattox, D. M.
Aineistotyyppi: Kirja
Kieli:Undetermined
Julkaistu: Westwood, N.J. Noyes Publications 1998
Aiheet:
Tagit: Lisää tagi
Ei tageja, Lisää ensimmäinen tagi!
Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Cần Thơ