Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry /

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Development of parametric material, energy, emission inventories for wafer fabrication in the semiconductor industry /

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書目詳細資料
其他作者:	Allen, David T., Dyer, David E., Kenig, George A., Laurent, Jean-Philippe., Murphy, Cynthia F.
格式:	Bài viết
語言:	English
主題:	Electronics industry Emissions inventory Energy consumption Microelectronic fabrication Pollutant emission Raw materials Semiconductor materials
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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