Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents /

সংরক্ষণ করুন:
গ্রন্থ-পঞ্জীর বিবরন
অন্যান্য লেখক: Carty, Arthur J., Chen, Yao-Lun., Chi, Yun., Lai, Ying-Hui., Lee, Gene-Hsiang., Liu, Chao-Shiuan., Peng, Shie-Ming.
বিন্যাস: প্রবন্ধ
ভাষা:English
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Thư viện lưu trữ: Thư viện Trường Đại học Đà Lạt
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245 # # |a Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents /  |c Ying-Hui Lai ... [et al.]. 
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773 # # |t Journal of Materials Chemistry  |g Vol. 13, no. 8 (2003), p. 1999-2006 
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