Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents /

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Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents /

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Détails bibliographiques
Autres auteurs:	Carty, Arthur J., Chen, Yao-Lun., Chi, Yun., Lai, Ying-Hui., Lee, Gene-Hsiang., Liu, Chao-Shiuan., Peng, Shie-Ming.
Format:	Article
Langue:	English
Sujets:	Electrical conductivity Inorganic compounds Microstructure Transition element compounds Transition elements Volatility
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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