The science and engineering of microelectronic fabrication

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The science and engineering of microelectronic fabrication

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This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...

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Bibliografiske detaljer
Hovedforfatter:	Stephen A. Campbell
Sprog:	Undetermined English
Udgivet:	New York Oxford University Press 2001
Fag:	Semiconductors > Design and construction
Tags:	Tilføj Tag Ingen Tags, Vær først til at tagge denne postø!

Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Trà Vinh

Lignende værker

The science and engineering of microelectronic fabrication
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