The science and engineering of microelectronic fabrication

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The science and engineering of microelectronic fabrication

Veure altres versions (2)

This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...

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Dades bibliogràfiques
Autor principal:	Stephen A. Campbell
Idioma:	Undetermined English
Publicat:	New York Oxford University Press 2001
Matèries:	Semiconductors > Design and construction
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

Thư viện lưu trữ:	Trung tâm Học liệu Trường Đại học Trà Vinh

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