The science and engineering of microelectronic fabrication
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...
Salvato in:
| Autore principale: | |
|---|---|
| Lingua: | Undetermined English |
| Pubblicazione: |
New York
Oxford University Press
2001
|
| Soggetti: | |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|
| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Trà Vinh |
|---|
| Riassunto: | This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST) |
|---|---|
| Descrizione fisica: | 603 p. ill. 24 cm |
| ISBN: | 195136055 |