The science and engineering of microelectronic fabrication

This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...

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Bibliografische gegevens
Hoofdauteur: Stephen A. Campbell
Taal:Undetermined
English
Gepubliceerd in: New York Oxford University Press 2001
Onderwerpen:
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Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Trà Vinh
Omschrijving
Samenvatting:This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST)
Fysieke beschrijving:603 p.
ill.
24 cm
ISBN:195136055