The science and engineering of microelectronic fabrication

This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...

Cur síos iomlán

Đã lưu trong:
Sonraí Bibleagrafaíochta
Príomhúdar: Stephen A. Campbell
Teanga:Undetermined
English
Foilsithe: New York Oxford University Press 2001
Ábhair:
Clibeanna: Cuir Clib Leis
Gan Chlibeanna, Bí ar an gcéad duine leis an taifead seo a chlibeáil!
Thư viện lưu trữ: Trung tâm Học liệu Trường Đại học Trà Vinh
Cur Síos
Achoimre:This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST)
Cur Síos Fisiciúil:603 p.
ill.
24 cm
ISBN:195136055