The science and engineering of microelectronic fabrication
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...
Saved in:
| Main Author: | |
|---|---|
| Language: | Undetermined English |
| Published: |
New York
Oxford University Press
2001
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institutions: | Trung tâm Học liệu Trường Đại học Trà Vinh |
|---|
| Summary: | This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST) |
|---|---|
| Physical Description: | 603 p. ill. 24 cm |
| ISBN: | 195136055 |