The science and engineering of microelectronic fabrication
This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etchi...
সংরক্ষণ করুন:
| প্রধান লেখক: | |
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| ভাষা: | Undetermined English |
| প্রকাশিত: |
New York
Oxford University Press
2001
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| বিষয়গুলি: | |
| ট্যাগগুলো: |
ট্যাগ যুক্ত করুন
কোনো ট্যাগ নেই, প্রথমজন হিসাবে ট্যাগ করুন!
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| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Trà Vinh |
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| সংক্ষিপ্ত: | This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST) |
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| দৈহিক বর্ননা: | 603 p. ill. 24 cm |
| আইসবিএন: | 195136055 |