Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Bibliographische Detailangaben
1. Verfasser:	Kim, Young-Min.
Weitere Verfasser:	Lee, Jong-Hyun., Yu, In-Sik.
Format:	Artikel
Sprache:	English
Schlagworte:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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