Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Autor principal:	Kim, Young-Min.
Altres autors:	Lee, Jong-Hyun., Yu, In-Sik.
Format:	Article
Idioma:	English
Matèries:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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