Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Chi tiết về thư mục
Tác giả chính:	Kim, Young-Min.
Tác giả khác:	Lee, Jong-Hyun., Yu, In-Sik.
Định dạng:	Bài viết
Ngôn ngữ:	English
Những chủ đề:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
Các nhãn:	Thêm thẻ Không có thẻ, Là người đầu tiên thẻ bản ghi này!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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