Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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书目详细资料
主要作者:	Kim, Young-Min.
其他作者:	Lee, Jong-Hyun., Yu, In-Sik.
格式:	Bài viết
语言:	English
主题:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
标签:	添加标签没有标签, 成为第一个标记此记录!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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