Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

محفوظ في:

التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Kim, Young-Min.
مؤلفون آخرون:	Lee, Jong-Hyun., Yu, In-Sik.
التنسيق:	مقال
اللغة:	English
الموضوعات:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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