Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Bibliografski detalji
Glavni autor:	Kim, Young-Min.
Daljnji autori:	Lee, Jong-Hyun., Yu, In-Sik.
Format:	Članak
Jezik:	English
Teme:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
Oznake:	Dodaj oznaku Bez oznaka, Budi prvi tko označuje ovaj zapis!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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