Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Detaylı Bibliyografya
Yazar:	Kim, Young-Min.
Diğer Yazarlar:	Lee, Jong-Hyun., Yu, In-Sik.
Materyal Türü:	Makale
Dil:	English
Konular:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
Etiketler:	Etiketle Etiket eklenmemiş, İlk siz ekleyin!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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