Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Détails bibliographiques
Auteur principal:	Kim, Young-Min.
Autres auteurs:	Lee, Jong-Hyun., Yu, In-Sik.
Format:	Article
Langue:	English
Sujets:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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