Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Fabrication and characterization of silicon probe tip for vertical probe card using MEMS technology /

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Podrobná bibliografie
Hlavní autor:	Kim, Young-Min.
Další autoři:	Lee, Jong-Hyun., Yu, In-Sik.
Médium:	Článek
Jazyk:	English
Témata:	Annealing process Deep-RIE Porous silicon micromachining Probe tip Thermal expansion
Tagy:	Přidat tag Žádné tagy, Buďte první, kdo otaguje tento záznam!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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