Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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التفاصيل البيبلوغرافية
المؤلف الرئيسي:	Grill, Alfred.
التنسيق:	مقال
اللغة:	English
الموضوعات:	Interconnects PECVD PSICOH dielectric Ultralow-k dielectrics
الوسوم:	إضافة وسم لا توجد وسوم, كن أول من يضع وسما على هذه التسجيلة!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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