Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Autor principal:	Grill, Alfred.
Format:	Article
Idioma:	English
Matèries:	Interconnects PECVD PSICOH dielectric Ultralow-k dielectrics
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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