Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /
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| Hovedforfatter: | Grill, Alfred. |
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| Format: | Bài viết |
| Sprog: | English |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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