Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /
में बचाया:
| मुख्य लेखक: | Grill, Alfred. |
|---|---|
| स्वरूप: | लेख |
| भाषा: | English |
| विषय: | |
| टैग : |
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| Thư viện lưu trữ: | Thư viện Trường Đại học Đà Lạt |
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