Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας:	Grill, Alfred.
Μορφή:	Άρθρο
Γλώσσα:	English
Θέματα:	Interconnects PECVD PSICOH dielectric Ultralow-k dielectrics
Ετικέτες:	Προσθήκη ετικέτας Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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