Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Bibliographische Detailangaben
1. Verfasser:	Grill, Alfred.
Format:	Artikel
Sprache:	English
Schlagworte:	Interconnects PECVD PSICOH dielectric Ultralow-k dielectrics
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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