Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Bibliografiska uppgifter
Huvudupphovsman:	Grill, Alfred.
Materialtyp:	Artikel
Språk:	English
Ämnen:	Interconnects PECVD PSICOH dielectric Ultralow-k dielectrics
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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