Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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Porous pSiCOH ultralow-k dielectrics for chip interconnects prepared by PECVD /

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書誌詳細
第一著者:	Grill, Alfred.
フォーマット:	論文
言語:	English
主題:	Interconnects PECVD PSICOH dielectric Ultralow-k dielectrics
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Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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