Công nghệ vi hệ thống cơ điện tử

Trình bày về vấn đề tỷ lệ kích thước, phương pháp khắc bức xạ, kỹ thuật khắc khô, kỹ thuật chế tạo màng mỏng, công nghệ vi cơ khối ướt, công nghệ vi cơ bề mặt, công nghệ liga, công nghệ đóng gói...

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Bibliographic Details
Main Author:	Vũ, Ngọc Hùng
Format:	Book
Language:	Undetermined
Published:	H. Bách khoa Hà Nội 2016
Subjects:	Công nghệ điện tử; Cơ điện tử > Vi hệ thống
Online Access:	http://lrc.tdmu.edu.vn/opac/search/detail.asp?aID=2&ID=27738
Tags:	Add Tag No Tags, Be the first to tag this record!

Institutions:	Trung tâm Học liệu Trường Đại học Thủ Dầu Một

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http://lrc.tdmu.edu.vn/opac/search/detail.asp?aID=2&ID=27738

Công nghệ vi hệ thống cơ điện tử

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