The science and engineering of microelectronic fabrication
Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture...
Uloženo v:
| Hlavní autor: | |
|---|---|
| Další autoři: | |
| Jazyk: | Undetermined English |
| Vydáno: |
New York
Oxford University Press
2001
|
| Témata: | |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|
| Thư viện lưu trữ: | Trung tâm Học liệu Trường Đại học Trà Vinh |
|---|
Buďte první, kdo okomentuje tento záznam!