Chemical vapor deposition of tantalum carbide and carbonitride thin films from Me3CETa(CH2CMe3)3(E= CH, N) /
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| Other Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Subjects: | |
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| Institutions: | Thư viện Trường Đại học Đà Lạt |
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