Nanoimprint lithography materials development for semiconductor device fabrication /

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Nanoimprint lithography materials development for semiconductor device fabrication /

Wedi'i Gadw mewn:

Manylion Llyfryddiaeth
Awduron Eraill:	Costner, Elizabeth A., Jen, Wei-Lun., Lin, Michael W., Willson, C. Grant.
Fformat:	Erthygl
Iaith:	English
Pynciau:	Dual damascene Imprint template Nanofabrication Next-generation lithography
Tagiau:	Ychwanegu Tag Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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