Nanoimprint lithography materials development for semiconductor device fabrication /

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Nanoimprint lithography materials development for semiconductor device fabrication /

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Bibliografiska uppgifter
Övriga upphovsmän:	Costner, Elizabeth A., Jen, Wei-Lun., Lin, Michael W., Willson, C. Grant.
Materialtyp:	Artikel
Språk:	English
Ämnen:	Dual damascene Imprint template Nanofabrication Next-generation lithography
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

Thư viện lưu trữ:	Thư viện Trường Đại học Đà Lạt

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